发明名称 Planar vertical resistor and bond pad resistor and related method
摘要 Resistors that avoid the problems of miniaturization of semiconductor devices and a related method are disclosed. In one embodiment, a resistor includes a planar resistor material that extends vertically within at least one metal layer of a semiconductor device. In another embodiment, a resistor includes a resistor material layer extending between a first bond pad and a second bond pad of a semiconductor device. The two embodiments can be used alone or together. A related method for generating the resistors is also disclosed.
申请公布号 US7528048(B2) 申请公布日期 2009.05.05
申请号 US20070954782 申请日期 2007.12.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COOLBAUGH DOUGLAS D.;DALTON TIMOTHY J.;EDELSTEIN DANIEL C.;ESHUN EBENEZER E.;GAMBINO JEFFREY P.;PETRARCA KEVIN S.;STAMPER ANTHONY K.;VOLANT RICHARD P.
分类号 H01L21/20 主分类号 H01L21/20
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