发明名称 Zinc oxide optical waveguides
摘要 The present disclosure includes methods, devices, and systems having zinc oxide waveguides for optical signal interconnections. One optical signal interconnect system includes an oxide layer on a semiconductor substrate. A ZnO waveguide can be provided in the oxide layer and connected to a silicon detector to receive optical signals having a wavelength, for example, between 500 and 375 nanometers (nm).
申请公布号 US7529460(B2) 申请公布日期 2009.05.05
申请号 US20070717463 申请日期 2007.03.13
申请人 MICRON TECHNOLOGY, INC. 发明人 FORBES LEONARD;AHN KIE Y.
分类号 G02B6/12;G02B6/13 主分类号 G02B6/12
代理机构 代理人
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