发明名称 Interconnect structures with bond-pads and methods of forming bump sites on bond-pads
摘要 Microelectronic workpieces that have bump sites over bond-pads and methods of fabricating such bump sites. One embodiment of such a workpiece, for example, includes a substrate having a plurality of microelectronic dies comprising integrated circuitry and bond-pads, such as copper bond-pads, electrically coupled to the integrated circuitry. The workpiece further includes (a) a dielectric structure having a plurality of openings with sidewalls projecting from corresponding bond-pads, and (b) a plurality of caps over corresponding bond-pads. The individual caps can include a discrete portion of a barrier layer attached to the bond-pads and the sidewalls of the openings, and a discrete portion of a cap layer on the barrier layer. The caps are electrically isolated from each other and self-aligned with corresponding bond-pads without forming a mask layer over the cap layer.
申请公布号 US7528064(B2) 申请公布日期 2009.05.05
申请号 US20070872607 申请日期 2007.10.15
申请人 MICRON TECHNOLOGY, INC. 发明人 TANG SANH D.;TUTTLE MARK E.;COOK KEITH R.
分类号 H01L21/4763 主分类号 H01L21/4763
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