| 摘要 |
An apparatus and method for inspecting a sample is described. The apparatus can have an X-ray source and detector, a housing, an access aperture in the housing, an access door covering the access aperture, and a stage positionable to extend through the access aperture to a load/unload point outside the housing. The method can include opening the first access door, moving at least a portion of a stage through the first access aperture to a position outside of the housing to receive the sample, moving the stage into the housing, closing the first access door, moving the stage to a position for inspection of the sample, applying X-rays to the sample, receiving X-rays passing through the sample with the X-ray detector, generating one or more signals based on the received X-rays, and displaying an image of the sample for analysis based on the one or more signals.
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