发明名称 |
Extended-range tiltable micromirror |
摘要 |
A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate electrostatic actuator) being located beneath the micromirror. The progressive linkage includes a pair of torsion springs which are connected together to operate similar to a four-bar linkage with spring joints. The progressive linkage provides a non-linear spring constant which can allow the micromirror to be tilted at any angle within its range substantially free from any electrostatic instability or hysteretic behavior.
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申请公布号 |
US7529016(B1) |
申请公布日期 |
2009.05.05 |
申请号 |
US20060494223 |
申请日期 |
2006.07.27 |
申请人 |
ALLEN JAMES J;WIENS GLORIA J;BRONSON JESSICA R |
发明人 |
ALLEN JAMES J.;WIENS GLORIA J.;BRONSON JESSICA R. |
分类号 |
G02B26/00;G02B26/08 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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