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发明名称
SAMPLE DIMENSION MEASURING METHOD AND SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
IL156419(A)
申请公布日期
2009.05.04
申请号
IL20030156419
申请日期
2003.06.12
申请人
HITACHI, LTD.
发明人
分类号
G01B15/00;G01N23/225;H01J37/28
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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