SOFT X-RAY LIGHT SOURCE DEVICE AND EUV EXPOSURE APPARATUS AND ILLUMINATING METHOD,申请号KR20020064424-传众专利搜索

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发明名称	SOFT X-RAY LIGHT SOURCE DEVICE AND EUV EXPOSURE APPARATUS AND ILLUMINATING METHOD
摘要
申请公布号	KR100895227(B1)	申请公布日期	2009.05.04
申请号	KR20020064424	申请日期	2002.10.22
申请人		发明人
分类号	G21K1/06;H01L21/027;G03F7/20;G21K5/02;H05G2/00;(IPC1-7):H01L21/027	主分类号	G21K1/06
代理机构		代理人
主权项
地址

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