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发明名称
SSOI基板之制造方法
摘要
本发明提供了一种通过低温热处理分离基板形成SSOI基板的SSOI基板制造方法,其方法包括,提供基板,在上述基板的表面上形成SiGe层,在上述SiGe层的表面上生成具有比SiGe更少格数的Si而形成变形的矽层和向上述变形的矽层注入离子,其中在上述SiGe层的生成过程中掺加不纯物,达到注入的上述离子的深度处。因此可以制造表面的微细粗糙度良好的基板,通过被注入的离子和不纯物的互相作用在低温下也可以分离接合的基板,节省制造费用,并且容易地形成装置的结构。
申请公布号
TW200919648
申请公布日期
2009.05.01
申请号
TW097131791
申请日期
2008.08.20
申请人
西尔川股份有限公司
发明人
金寅谦;姜锡俊;陆炯相
分类号
H01L21/84(2006.01);H01L21/20(2006.01);H01L27/12(2006.01)
主分类号
H01L21/84(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
南韩
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