| 摘要 |
PROBLEM TO BE SOLVED: To safely and securely take up a wafer and to smoothly convey it to a prescribed conveyance destination after the wafer is held by a spinner table of a full installation type while a backside with a recess formed is exposed and cleaned. SOLUTION: An annular convex part 5A of the wafer 1 held by the spinner table 71 and cleaned is absorbed by an absorption pad 94 of a wafer take-up mechanism 90. An exposed surface-side is received by a robot pick 23c of a conveyance robot 23 and is absorbed and held. The conveyance robot 23 is operated and the wafer 1 is transported into a collection cassette 22B and stored therein. COPYRIGHT: (C)2009,JPO&INPIT |
