| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that if automatic dimming of a conventional line width measurement device is applied in a height measurement device that has a confocal microscope, the graph of an interrelation between luminance value and Z coordinate reaches the maximum luminance value in almost all the range of movement of the Z axis or the luminance value is low in almost all the range of movement of the Z axis, this makes it impossible to use the dynamic range of a camera effectively, resulting in inaccurate measurement. SOLUTION: Using an image obtained in processing similar to the height measurement, automatic dimming is carried out before the measurement of a height such that it is determined whether a parameter falls within a specified range. In this case, the peak value or representative value of a preset image area is used as the parameter for a quantity of light. Thus, the height measurement device can obtain the value of the optimum quantity of light. COPYRIGHT: (C)2009,JPO&INPIT
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