| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin composition sheet for sealing a hollow device with small warping to a base plate and a surface elastic wave element after sealing while restraining flowing of the sealing resin into the hollow portion and with good work stability when performing dicing, and a hollow device sealed using the sheet. SOLUTION: This resin composition sheet used for sealing an element requiring hollow sealing has the tension modulus of 1×10<SP>7</SP>-1×10<SP>9</SP>at 25°C after heat curing. And the hollow device is provided by sealing the element requiring hollow sealing using the resin composition sheet for sealing the hollow device. COPYRIGHT: (C)2009,JPO&INPIT
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