| 摘要 |
PROBLEM TO BE SOLVED: To decrease the trouble in terms of the product quality through finding a failure at an early stage by sensing presence or absence of a crack in a substrate in the manufacturing process of plasma display panels etc. SOLUTION: A substrate transferring device according to the invention is to transfer each glass substrate 3 coated with paste etc. when it is carried into and out of a baking furnace 2, and is furnished with an elevator unit 6 having an elevation/sinking pin 7 with its forefront abutting to one surface of the glass substrate 3 and levitating the substrate 3 from the transport surface, in which an optical sensor 8 is installed at the forefront of the pin 7 for sensing the change of the substrate 3 eventually broken when it 3 is levitated. This allows sensing presence or absence of any breakage of the substrate 3 and enables ejecting a failed substrate with breakage prior to forwarding to the next stage, so that it is possible to decrease the quality trouble through an early finding of failure and establish a stable operation of the facility. COPYRIGHT: (C)2009,JPO&INPIT
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