发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE |
摘要 |
A conductive film embedded in a predetermined region on an upper surface of an insulation film and metallic wirings embedded so as to penetrate through the conductive film and protrudes into the insulation film constitute a lower electrode of an MIM capacitor.
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申请公布号 |
US2009108405(A1) |
申请公布日期 |
2009.04.30 |
申请号 |
US20080257700 |
申请日期 |
2008.10.24 |
申请人 |
OOTANI ITARU;HAYASHI SHINICHIRO;NISHIURA SHINJI |
发明人 |
OOTANI ITARU;HAYASHI SHINICHIRO;NISHIURA SHINJI |
分类号 |
H01L29/92;H01L21/02 |
主分类号 |
H01L29/92 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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