| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for measuring displacement which enable detection of a skid component by laser light. SOLUTION: Divergent light given by the laser light L is radiated onto an irradiation object surface 100 through a quarter wave plate 25 and an objective lens 26 which forms a focus f in the front of the irradiation object surface 100. Using return light L' which is reflected by the irradiation object surface 100 and passes through the objective lens 26 and the quarter wave plate 25, the skid component is detected. COPYRIGHT: (C)2009,JPO&INPIT |
