DEFECT CLASSIFICATION METHOD AND DEFECT CLASSIFICATION APPARATUS

摘要

In a defect classification of an appearance inspection, there are needs to make the purity or accuracy of a critical defect or both adjusted to be equal to or more than a target value. However, since a condition of an instruction type defect classification is set so as to allow high correct answer rate on average, the defect classification has such a problem that it cannot comply with the needs. A defect classification method includes a characteristic amount extracting unit, a defect classification unit and a classification condition setting unit. The classification condition setting unit is provided with a function to instruct a defect characteristic amount that is made to correspond to a correct answer class and a function to designate a priority order of classification, and carries out condition setting in such a way that a high priority classification results in a high correct answer rate.