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发明名称
Tester für Halbleiteranordnungen mit einer mehrere voneinander isolierte Teile aufweisenden Spannvorrichtung
摘要
申请公布号
DE19638816(B4)
申请公布日期
2009.04.30
申请号
DE19961038816
申请日期
1996.09.20
申请人
KARL SUSS DRESDEN GMBH
发明人
DIETRICH, CLAUS;HIRSCHFELD, BOTHO;KREISIG, STEFAN;PUFF, RONALD;WACHTVEITL, ALF
分类号
H01L21/66;G01R31/28
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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