发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device and a method of manufacturing the same are provided to favorably apply stress to activation areas of NMOS and PMOS areas, thereby improving electrical properties of a transistor. A semiconductor device(150) comprises a semiconductor substrate(100), the first element isolation film(102) and the second element isolation film(106). The semiconductor substrate has an NMOS active area and a PMOS active area. The NMOS active area and the PMOS active area are adjacently arranged in the semiconductor substrate. A method of manufacturing a semiconductor device favorably applies different stress to activation areas of NMOS and PMOS areas by the first and second element isolation films.
申请公布号 KR20090042586(A) 申请公布日期 2009.04.30
申请号 KR20070108429 申请日期 2007.10.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 OH, SEUNG CHUL
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址