| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette for wafer with an intake valve for guiding external air into the cassette, canceling the vacuum condition and balancing the air pressure to enable the cassette to be easily opened. SOLUTION: The wafer cassette with the intake valve comprises a cassette and an intake valve. The intake valve is mounted on an exterior frame of the cassette, and comprises a guiding post, a sealing lid, a sealing washer and elastic members. The intake valve presses the guiding post and makes the sealing lid to correspond to an air hole on the exterior frame to seal the cassette by a provided elastic force by elastic members. Therefore the sealing washer presses between the sealing lid and the exterior frame to form air sealing. When opening the wafer cassette in vacuum condition inside the cassette, external force presses the guiding post, form a gap between the sealing lid and the exterior frame. At that time, external air passes through the air hole from the gap and goes into an interior cavity of the cassette. Thus, the cassette is easily opened. COPYRIGHT: (C)2009,JPO&INPIT |
