摘要 |
PROBLEM TO BE SOLVED: To obtain a liquid droplet discharge head that has a moisture permeation preventing function and has a long vibrating plate manufactured efficiently. SOLUTION: A part of an inorganic material layer 202 for forming a projecting part 202a for adhesion-joining the end face of the piezoelectric element 121 of the vibrating plate 102 that has a resin layer 201 is used and a process for forming projecting parts 202a is used as it is, and a thin layer 203 for the inorganic material layer 202 serving as a moisture permeation preventing film for the resin layer 201 is formed in a diaphragm part that is displaced according to the expansion/contraction of a piezoelectric element 121. This makes it possible to form the vibrating plate 102 capable of preventing moisture permeation of the resin layer 201 while restraining an increase in manufacturing cost increase, and to obtain a highly reliable liquid droplet discharge head at a low cost. COPYRIGHT: (C)2009,JPO&INPIT
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