发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device in which chips and cutting coolant are prevented from adhering to a moving means without installing a bellows mechanism covering the moving means for moving a chuck table in a cutting and feeding direction. SOLUTION: This cutting device comprises a chuck table mechanism having the chuck table for holding a workpiece, a cutting means for cutting the workpiece held on the chuck table, and a cutting and feeding means for moving the chuck table in the cutting and feeding direction. The chuck table mechanism comprises a support table for supporting the chuck table and a moving base for cantilevering one side of the support table. The cutting and feeding means comprises a guide means for movably guiding the moving base in the cutting and feeding direction and the moving means for moving the moving base along the guide means. A chip storage container having a receiving opening arranged along the guide means and receiving chips and cutting coolant is installed under the support table. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009090402(A) 申请公布日期 2009.04.30
申请号 JP20070262435 申请日期 2007.10.05
申请人 DISCO ABRASIVE SYST LTD 发明人 SATO MASAMI;KUSUNOKI YOSHIHIRO;TANAKA MANPEI
分类号 B23Q11/00;B23Q1/00;B23Q1/01;B23Q1/60;H01L21/301 主分类号 B23Q11/00
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