SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING SUBSTRATES
摘要
<p>An electronic device manufacturing system is disclosed. The system includes a processing tool having one or more processing chambers each adapted to perform an electronic device manufacturing process on one or more substrates; a substrate carrier adapted to couple to the system and carry one or more substrates; and a component adapted to create a sealed environment relative to at least a portion of the substrate carrier and to substantially equalize the sealed environment with an environment within the substrate carrier. Methods of the invention are described as are numerous other aspects.</p>
申请公布号
WO2009055612(A1)
申请公布日期
2009.04.30
申请号
WO2008US81015
申请日期
2008.10.23
申请人
APPLIED MATERIALS, INC.;RICE, MICHAEL, R.;HUDGENS, JEFFREY, C.