| 摘要 |
<p>A substrate loading apparatus transfers substrates between an atmospheric side and vacuum atmosphere. A container which can be hermetically sealed to be used for carrying in/out the substrates is provided with a substrate holder which can be freely moved by being thrust into the container, and a cover section to be freely opened/closed on an upper section of the container. The substrate holder freely switches inside the container to be in a separated state and in a communicating state by performing thrust movement in the container. In the separated state, the container inside is separated into upper and lower two chambers, and in the communicating state, the container inside is permitted to be one chamber. In the separated state, one chamber can be opened to the atmosphere, while maintaining the other chamber in vacuum state, and the substrates are carried in/out to and from the container by the chamber opened to the atmosphere. In the hermetically closed state with the cover section closed, the substrates are moved between the two chambers in the container by having the container inside in the communicating state. Thus, the substrates can be carried in/out without requiring a gate valve.</p> |
