| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide excellent in transparency and reliability, and to provide the optical waveguide manufactured by using the method. SOLUTION: The method of manufacturing optical waveguide includes: a step of forming a photosensitive resin layer on a substrate; a step of exposing a desired pattern; and a step of developing the exposed pattern by using an alkaline developing liquid containing a divalent or higher-valent metal ion. The method of manufacturing optical waveguide includes: a step of forming a photosensitive resin layer on a substrate; a step of exposing a desired pattern; a step of developing the exposed pattern by using an alkaline developer liquid; and a step of washing the developed pattern by using a washing liquid containing divalent or higher-valent metal ion. Alternatively, the method of manufacturing optical waveguide includes: a step of forming a photosensitive resin layer on a substrate; a step of exposing a desired pattern; a step of developing the exposed pattern by using an alkaline developing liquid containing divalent or higher-valent metal ion; and a step of washing the developed pattern by using a washing liquid containing divalent or higher-valent metal ion. COPYRIGHT: (C)2009,JPO&INPIT |
