| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe manufacturing method which provides short manufacturing time and can reduce manufacturing costs. SOLUTION: The probe manufacturing method is for a probe comprising a support part to be mounted to a substrate of a probe card, a beam part which has elasticity and is supported by the support part, and a tip part which is the tip of the beam part and has a contact tip to be in contact with an electrode of an object to be inspected. The method includes: a step of forming a conductive layer on a metallic plate and leaving the conductive layer in a plurality of islands manner by etching at places in which the probes are formed; a step of forming slits between the conductive layer left in a plurality of islands manner with part of the metallic plate left as connecting parts for connecting the plurality of probes and removing the metallic plate between the adjacent probes; and a step of forming the metallic plate into a side shape corresponding to the support part, the beam part and the tip part of the probe by press working. A plurality of probes are manufactured so that they are connected by the connecting parts. COPYRIGHT: (C)2009,JPO&INPIT
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