发明名称 |
OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD |
摘要 |
An illumination optical apparatus has an optical unit (3). The optical unit has a light splitter (35) to split an incident beam into two beams; a first spatial light modulator (33) which can be arranged in an optical path of a first beam; a second spatial light modulator (34) which can be arranged in an optical path of a second beam; and a light combiner (36) which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements (33a, 34a) arranged two-dimensionally and controlled individually. |
申请公布号 |
WO2009054541(A2) |
申请公布日期 |
2009.04.30 |
申请号 |
WO2008JP69704 |
申请日期 |
2008.10.23 |
申请人 |
NIKON CORPORATION;TANITSU, OSAMU |
发明人 |
TANITSU, OSAMU |
分类号 |
G02B27/09;G03F7/20 |
主分类号 |
G02B27/09 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|