| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an original conveying device, an exposure device and a device manufacturing method, such that productivity is improved by reducing sticking of particles suspended in a decompression chamber during air discharge or air supply. <P>SOLUTION: The original conveying device includes the decompression chamber in which a decompression state is maintained and an original is carried in and processed, a mask cassette which is conveyed into the decompression chamber together with the original and includes a dish portion holding the original and a lid portion covering the dish part, a first temperature control means provided to the dish portion to hold the dish portion at first temperature lower than the temperature of the original, and a second temperature control means provided to the lid portion to hold the lid portion at second temperature below the temperature of the dish portion. <P>COPYRIGHT: (C)2009,JPO&INPIT |
