| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for detecting foreign substances, capable of detecting the presence of a foreign substance on a surface, in a short time having detection accuracy for a foreign substance of the same degree as that of an expert, without using equipment having complex components, and to provide a method therefor and a computer program therefor. SOLUTION: Image data on the surface of a plate object to be inspected is acquired and the location of a substance is detected from the image data acquired. Location data and color data are acquired as image data every pixel unit and a representative luminance value of color data is calculated for a pixel unit. The average luminance value of representative luminance values calculated is calculated, and a luminance width formed with predetermined width, having a range from the average luminance value. It is determined whether the representative luminance value for a pixel unit calculated is in the range of the luminance width calculated; and when it is determined that the value is not within the range the location, position data of pixels are stored. COPYRIGHT: (C)2009,JPO&INPIT
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