发明名称 WAFER MOVEMENT CONTROL MACROS
摘要 A computer-implemented method for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool, which has a plurality of wafer-holding locations. The method includes receiving a first user-provided location indicator and a second user-provided location indicator, which graphically identify the origination wafer-holding location and destination wafer-holding location respectively on the on-screen graphical representation of the plasma cluster tool. The method further includes ascertaining data pertaining to a path between the first user-provided location indicator and the second user-provided location indicator. The method further includes forming the set of wafer transfer instructions responsive to the data pertaining to the path. The set of wafer transfer instructions is configured to transfer the wafer along a set of wafer-holding locations associated with the path.
申请公布号 WO2006086577(A3) 申请公布日期 2009.04.30
申请号 WO2006US04625 申请日期 2006.02.08
申请人 LAM RESEARCH CORPORATION;THORGRIMSSON, CHRISTOPHER FRYER 发明人 THORGRIMSSON, CHRISTOPHER FRYER
分类号 G06F19/00;G06F7/00 主分类号 G06F19/00
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