| 摘要 |
PROBLEM TO BE SOLVED: To provide a brush assembly and a substrate cleaning apparatus provided with the same. SOLUTION: In an apparatus for cleaning a substrate using a brush, the brush assembly includes: a shaft arranged so as to be rotated inside a process chamber; the brush arranged at the center part of the shaft, for receiving the supply of cleaning liquid to wash the substrate and cleaning the substrate by being in contact with the surface of the substrate; and a blowing unit for generating air flow so as to prevent the cleaning liquid supplied to the brush from flowing toward the end part of the shaft along the shaft while cleaning the substrate. Thus, the cleaning liquid supplied to the brush is prevented from leaking to the outside of the process chamber. COPYRIGHT: (C)2009,JPO&INPIT
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