| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a crimping machine for a mask pattern film causing no wrinkle and no residual air bubbles. <P>SOLUTION: The crimping machine includes a vacuum roller 12 and a work bench 20, in which the vacuum roller has a shaft and a vacuum suction roller actuation face and is vertically movable to an object to be processed on the work bench, and the work bench has an object mounting face 21 having a vacuum suction function and is installed horizontally movable. The crimping step of a mask pattern film includes; sucking and setting a mask pattern film on the object mounting; sending the film to below the roller actuation face of the vacuum roller while lowering the roller to suck the film to the roller actuation face; then retracting the work bench and sucking and setting a pressure-sensitive adhesive film on the object mounting face; similarly adhering the adhesive film to the roller actuation face; again sucking and setting a substrate to be processed on the object mounting face; and crimping the three sheets by the roller actuation face. <P>COPYRIGHT: (C)2009,JPO&INPIT |
