| 摘要 |
PROBLEM TO BE SOLVED: To provide a flatness measuring instrument and a flatness measuring method used for accurately measuring the flatness of a measured material even if vibration or mechanical distortion arises in a measurement mechanism (gauge head) or the like. SOLUTION: This flatness measuring instrument includes first displacement measuring means 11 for measuring a surface displacement of a measured material 3, a standard plate 15a whose surface parallelism and/or surface profile are known, and second displacement measuring means 12 for measuring a surface displacement of the standard plate 15a. The measuring means 11 and 12 are integrally joined to each other, making it possible to synchronize the measurement of the surface displacement of the measured material 3 with that of the standard plate 15a performed by the measuring means 11 and 12, respectively. This instrument further includes flatness operation means for adding and/or subtracting a measurement value of the measuring means 12 to/from a measurement value of the measuring means 11 to calculate the flatness of the measured material 3 from the result of the addition or subtraction. COPYRIGHT: (C)2009,JPO&INPIT
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