发明名称 |
MEMS SCANNER HAVING ACTUATOR SEPARATED FROM MIRROR |
摘要 |
A microelectromechanical systems (MEMS) scanner is provided. The MEMS scanner includes: a stationary frame; a first movable stage disposed inside the stationary frame and suspended on the stationary frame so as to pivot and vibrate around a virtual center shaft; a second movable stage disposed inside the first movable stage and suspended on the first movable stage so as to pivot and vibrate around the center shaft; and an actuator providing a driving force used to pivot and vibrate the first movable stage.
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申请公布号 |
US2009109512(A1) |
申请公布日期 |
2009.04.30 |
申请号 |
US20080054615 |
申请日期 |
2008.03.25 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK YONG-HWA |
分类号 |
G02B26/10 |
主分类号 |
G02B26/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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