发明名称 MEASUREMENT APPARATUS AND MEASUREMENT METHOD
摘要 There are provided a measurement apparatus and a measurement method capable of stably measuring the physical quantity involved in a measurement object. Two or more electrostatic capacity type displacement sensing devices are mutually connected in their earths and apply to the measuring heads carrier signals each including a sinusoidal wave of a same frequency wherein a sum total of phases becomes 0°, respectively, so that a thickness of the measurement object is measured.
申请公布号 US2009108853(A1) 申请公布日期 2009.04.30
申请号 US20080256192 申请日期 2008.10.22
申请人 ONO SOKKI CO., LTD. 发明人 YUYAMA MINORU;IIZUKA HIROYUKI
分类号 G01B7/06;G01R27/26 主分类号 G01B7/06
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