| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator, having a fine structure, which has a large displacement and good displacement controllability for a driving waveform. <P>SOLUTION: The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film is denoted by Pδ<SB>MAX</SB>; and a point located on a circumference of a reference-circle having Pδ<SB>MAX</SB>as a center and having a minimum difference in displacement from Pδ<SB>MAX</SB>is denoted by Pδ<SB>A</SB>, the diaphragm has a shape capable of determining an axis A<SB>1</SB>set in a straight-line joining Pδ<SB>MAX</SB>and Pδ<SB>A</SB>, the diaphragm consists of a single-crystalline-material in which a plane orthogonal to A<SB>1</SB>and perpendicular to an axis A<SB>2</SB>on the diaphragm surface, is a ä110}-plane, and the piezoelectric film is a ä100}-single-orientation film. <P>COPYRIGHT: (C)2009,JPO&INPIT |
