ANTI-FUSE STRUCTURE INCLUDING A SENSE PAD CONTACT REGION AND METHODS FOR FABRICATION AND PROGRAMMING THEREOF

摘要

An antifuse structure includes a sense pad contact region that is separate from an anode contact region and a cathode contact region. By including the sense pad contact region that is separate from the anode contact region and the cathode contact region, a programming current flow when programming the antifuse structure may travel a different pathway than a sense current flow when sensing the antifuse structure. In particular a sense current flow may avoid a depletion region created within the cathode contact region when programming the antifuse structure.