| 摘要 |
The invention relates to devices and apparatus for web guiding and cooling of webs during thin-film forming. A guiding device for contact-free guiding a web is provided with the device having a surface for facing the web and a multitude of gas outlets disposed in the surface and adapted for providing a hover cushion for the web. Further, an apparatus for coating a web and a method for contact-free guiding a web is provided that comprises moving the web over a surface and emitting a multitude of gas streams from the surface, thereby generating a hover cushion between the surface and the web. Further, a method for producing a thin-film solar cell is provided that comprises a method for contact-free guiding a web according to embodiments described herein. The method for producing a thin-film solar cell further comprises depositing a back contact on the web and depositing a transparent and conductive oxide layer.
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