| 摘要 |
<p>APPARATUS FOR CLEANING RETICLES A cleaning apparatus is disclosed to clean a flat object. The cleaning apparatus includes at least one center-cleaning station and at least one margin-cleaning station. The center-cleaning station cleans a center of an upper side of the flat object. The margin-cleaning station cleans a margin of the upper side of the flat object and a margin of a lower side of the same as shown in Figure 3.</p> |
