| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element using an Si substrate that controls the applied voltage dependency of piezo-electric constant d<SB>31</SB>. <P>SOLUTION: The piezo-electric element includes the Si substrate, a piezo-electric film of niobic acid potassium sodium of perovskite structure whose general formula is (K, Na)NbO<SB>3</SB>formed on the upper portion of the Si substrate, and an intermediate layer formed between the Si substrate and the piezo-electric film, which makes the piezo-electric film generate stress in a compressing direction. <P>COPYRIGHT: (C)2009,JPO&INPIT |
