| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device and its inspection method allowing a probe needle to contact each electrode with a margin. SOLUTION: The semiconductor device includes a source electrode group and a gate electrode group in a semiconductor chip 10, wherein the source electrode group and the gate electrode group are arranged in the same row, and the arranged spacing of a plurality of source electrodes 3 included in the source electrode group is larger than that of a plurality of gate electrodes 4 included in the gate electrode group. The source electrode 3 includes a first source electrode 3a and a second source electrode 3b, and its external form is substantially rectangular in a plan view by a combination of the first source electrode 3a and second source electrode 3b. The first source electrode 3a is formed such that the width along a row direction is larger on the lower side than on the upper side in a plan view on both sides of a centerline extending along the row direction of the source electrode group, and the second source electrode 3b is formed such that the width along the row direction is larger on the upper side than on the lower side in a plan view on both sides of the centerline. COPYRIGHT: (C)2009,JPO&INPIT
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