发明名称 |
Byproduct Collecting Apparatus of Semiconductor Apparatus |
摘要 |
Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.
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申请公布号 |
US2009107091(A1) |
申请公布日期 |
2009.04.30 |
申请号 |
US20070226994 |
申请日期 |
2007.04.25 |
申请人 |
CHO CHE-HOO;HONG JUNG-EUI;KIM TAE-WOO;HWANG IN-MUN |
发明人 |
CHO CHE-HOO;HONG JUNG-EUI;KIM TAE-WOO;HWANG IN-MUN |
分类号 |
B01D45/16;B01D45/06 |
主分类号 |
B01D45/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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