SIGNAL-CARRYING FLEXURE STRUCTURE FOR MICROELECTRO-MECHANICAL DEVICES

摘要

A signal-carrying flexure structure for a MEM device comprises at least two conductive flexure segments having respective cross-sectional areas, and at least one crosspiece affixed to the flexure segments to operatively couple the segments together such that the flexure segments and crosspiece form a single flexure structure. The resulting flexure structure's spring constant is less than that of a solid flexure having a comparable total cross- sectional area, while its resistance is approximately equal to that of the solid flexure.