发明名称 PIEZOELECTRIC-ACTUATOR DRIVING DEVICE, AND EXPOSURE APPARATUS USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To continuously drive a device even when a short circuit by migration occurs, in a driving device provided with a laminated piezoelectric actuator without having redundancy. <P>SOLUTION: In this piezoelectric-actuator driving device, a plurality of layered product blocks formed of a plurality of piezoelectric elements are serially arranged, every layered block has a line becoming a positive electrode and a negative electrode, and the respective layered blocks are electrically connected in parallel to one another, whereby a voltage is applied independently. An insulation failure and a short circuit are detected by comparing a current flowing to the piezoelectric-actuator with a normal value. Only the layered block with an insulation failure or a short circuit detected therein is disconnected from a drive circuit. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009094284(A) 申请公布日期 2009.04.30
申请号 JP20070263494 申请日期 2007.10.09
申请人 CANON INC 发明人 OTA JUN
分类号 H01L41/083;G03F7/20;H01L21/027;H01L41/09 主分类号 H01L41/083
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