| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To surely and easily attain data linkage between EES AND MES in which device data is bound to context data. <P>SOLUTION: A host communication system 4 comprises a processing means for MES event data 4A, which transfers, when an event occurs in a semiconductor manufacturing device 2, only event data requiring event report to a manufacturing host computer (MES) 1 to the MES; and a definition means and a processing means for ESS event data 4B, which transfers only event data requiring event report to a device engineering computer (EES) 3 to a device EES communication system 5. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
