| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing process and manufacturing equipment of an organic film which can manufacture a high performance organic functionality element and to further provide a manufacturing process of an organic EL element, an organic solar cell and an organic functionality layer transistor using this manufacturing process. <P>SOLUTION: The manufacturing process of the organic functionality layer has the step of applying a coating liquid which dissolves or disperses organic functionality material in a first organic solvent onto a substrate using a printing method to form an organic functionality coating film, the step of attaching the coating film to the vapor of a second organic solvent, and the step of discharging a fluid containing the second organic solvent to the rear surface of the surface of the substrate formed with the coating film of the substrate or the substrate installing part coming into contact with the rear surface. In the manufacturing process of the organic functionality layer, the second organic solvent (1) is chemically inactive, (2) can be mixed with the first organic solvent, and (3) does not dissolve the organic functionality material, and (4) the vapor pressure of the second organic solvent is higher than the vapor pressure of the first organic solvent at the ordinary temperature. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
