METHOD FOR OBSERVING X-RAY TOMOGRAPHIC IMAGE OF PRINTED CIRCUIT BOARD, AND DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a nondestructive inspection method capable of grasping the state of an internal layer circuit of a multilayer printed circuit board from any angle, even for any type of multilayered printed circuit board. SOLUTION: The method includes the steps of measuring the internal circuit structure of the printed circuit board using a fixed X-ray generator, a fixed vertical transmission X-ray generator, and movable inclined transmission X-ray generators of 2N (an integer of N≥1) units or larger; detecting X-rays passing through the printed circuit board using the fixed vertical transmission X-ray generator, and movable inclined transmission X-ray generators of 2N (an integer of N≥1) units or larger; converting the intensity of X-rays detected by these detectors to a signal; and three-dimensionally displaying the circuit profile from an external layer to an internal layer in the printed circuit board by using this signal. COPYRIGHT: (C)2009,JPO&INPIT