| 发明名称 |
AMIDOXIME COMPOUNDS AS CHELATING AGENTS IN SEMICONDUCTOR PROCESSES |
| 摘要 |
The present invention is a composition and cleaning method for use in semiconductor processes wherein the compositions comprises at least one amidoxime compound.
|
| 申请公布号 |
US2009107520(A1) |
申请公布日期 |
2009.04.30 |
| 申请号 |
US20080260358 |
申请日期 |
2008.10.29 |
| 申请人 |
LEE WAI MUN;SCIALDONE MARK A;ANDERSON ALBERT G |
发明人 |
LEE WAI MUN;SCIALDONE MARK A.;ANDERSON ALBERT G. |
| 分类号 |
C23G1/00;C11D1/66 |
主分类号 |
C23G1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
