发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a semiconductor substrate, a diffusion layer conductive film formed on the semiconductor substrate, an interlayer insulating film layered on the semiconductor substrate, an interconnect pattern and a via pattern formed in the interlayer insulating film, a plurality of circuit regions formed in the semiconductor substrate, and a scribe region formed around the circuit regions and separating the circuit regions from each other. The diffusion layer conductive film is not formed at least in a region to which laser light is emitted in the scribe region.
申请公布号 US2009108410(A1) 申请公布日期 2009.04.30
申请号 US20080137018 申请日期 2008.06.11
申请人 TAKEMURA KOJI;KUMAKAWA TAKAHIRO;MATSUSHIMA YOSHIHIRO 发明人 TAKEMURA KOJI;KUMAKAWA TAKAHIRO;MATSUSHIMA YOSHIHIRO
分类号 H01L23/544 主分类号 H01L23/544
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