发明名称 METHOD FOR COATING AND APPARATUS
摘要 The invention relates to thin-film generating. A method is provided for coating a substrate with an evaporation material, the evaporation material comprising one or more metals chosen from the group consisting of light metals; noble metals; poor metals; alkaline earth metals; transition metals from the VI subgroup or VIII subgroup; and lanthanides, with the steps of providing the evaporation material, a portion of the evaporation material being oxidized; providing a reducing agent different from the evaporation material; heating the evaporation material and the reducing agent; wherein the evaporation material and the reducing agent are chosen such that due to the presence of the reducing agent the portion of the oxidized evaporation material is reduced and/or that the evaporation temperature of the oxide of the reducing agent is lower than or equal to the evaporation temperature of the evaporation material.
申请公布号 US2009110807(A1) 申请公布日期 2009.04.30
申请号 US20080251157 申请日期 2008.10.14
申请人 APPLIED MATERIALS, INC. 发明人 KOENIG MICHAEL
分类号 B05D5/12;C23C16/54 主分类号 B05D5/12
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