ANTENNA DIODES WITH ELECTRICAL OVERSTRESS (EOS) PROTECTION

摘要

ANTENNA DIODES WITH ELECTRICAL OVERSTRESS (EOS) PROTECTION An antenna diode circuit for discharging static charge accumulated during wafer processing is described. The antenna diode circuit includes first and second junctions coupled to a circuit element and substrate. Between the first and second junctions is a diode circuit path with an antenna diode and at least one diode protection circuit coupled in series. The diode protection circuit reduces or prevents EOS current from flowing through the diode circuit path during an EOS event.