LIFT PIN MECHANISM, HEAT TREATMENT EQUIPMENT, AND REDUCED PRESSURE DRYING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a lift pin mechanism capable of preventing a movable pin from coming into contact with the same position of a member to be treated by a simple structure. SOLUTION: The member GB to be treated does not horizontally move, but the movable pin 110 separate downward from the member GB horizontally moves. Thus, a moving range of the movable pin 110 need not be limited, so that possibility of the movable pin 110 coming into contact with the same position of the GB can be reduced. COPYRIGHT: (C)2009,JPO&INPIT